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Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 85-89

Study of interfacial adhesion energy of multilayered ULSI thin film structures using four-point bending test

Author keywords

Four point bending; Photoelectron microscopy; Polyarylene ether (PAE); Silicon carbide

Indexed keywords

ADHESION; INTERFACIAL ENERGY; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

BARRIER LAYERS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY (FESEM); FOUR-POINT BENDING TECHNIQUE; INTERFACIAL ADHESION ENERGY;

ULTRATHIN FILMS;

INTERFACIAL TENSION;

EID: 20744447618 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.036 Document Type: Article

Times cited : (31)

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