A differential mechanical profilometer for thickness measurement

Review of Scientific Instruments

Volumn 75, Issue 12, 2004, Pages 5362-5363

  Alves, J Maia ^a   Brito, M C ^a   Serra, J M ^a   Vallera A M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; INTERFEROMETRY; LASER APPLICATIONS; SENSITIVITY ANALYSIS; SENSORS; THICKNESS MEASUREMENT; THIN FILMS; TRANSDUCERS;

DIFFERENTIAL MECHANICAL PROFILOMETERS; DISPLACEMENT TRANSDUCERS; LASER-ULTRASOUND SPECTROSCOPY; SIGNAL CONDITIONER SCHEMATICS;

PROFILOMETRY;

EID: 20444451258     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1821627     Document Type: Article

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