Patch antenna on micromachined silicon

2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Volumn , Issue , 2004, Pages 29-32

  Hasch, Jurgen ^a   Haghighi, Tahereh ^a   Schollhorn, Claus ^b   Kasper, Erich ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; COSTS; MICROMACHINING; MICROSTRIP ANTENNAS; MONOLITHIC INTEGRATED CIRCUITS; NATURAL FREQUENCIES; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SURFACE WAVES; THIN FILMS;

ANTENNA PATTERN; MICROSTRIP FEEDLINE; PATCH ANTENNA; SILICON CHIPS;

SEMICONDUCTING SILICON;

EID: 20344398165     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. P. Russer, Si and sige millimeter-wave integrated circuits, IEEE Trans. Microwave Theory Tech., vol. 46, no. 5, pp. 590 603, 1998.
2. M. Singer, K. Strohm, J. Luy, and E. Biebl, Active simmwic-antenna for automotive applications, in IEEE MTT-S, 1997.
3. I. Papapolymerou, F. F. Dryton, and L. Katehi, Micro-machined patch antenna, IEEE Trans. on Antennas and Propagation, vol. 46, no. 2, pp. 275 283, 1998.
4. J. Hasch, H. Irion, and A. Mueller, Microstrip circuits on micromachined silicon, in Silicon Monolithic Integrated Circuits in RF Systems, 2004.
5. F. Laermer, A. Schilp, K. Funk, and M. Offenberg, Bosch deep silicon etching: Improving uniformity and etch rate for advanced mems apllications, in Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999.
6. D. M. Pozar, Considerations for millimeter wave printed antennas, IEEE Trans. on Antennas and Propagation, vol. 27, no. 12, pp. 987 993, 1979.
7. C. A. Balanis, Antenna Theory. John Wiley & Sons, 1997.
8. G. Dubost, In uence of surface waves upon ef cienc y and mutual coupling between rectangular microstrip antennas, in Antennas and Propagation Society International Symposium, 1990.