Electron beam lithography and liftoff of molecules and DNA rafts

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 201-203

  Bernstein, Gary H ^a   Hu, Wenchuang ^a   Hang, Qingling ^a   Sarveswaran, Koshala ^a   Lieberman, Marya ^a  

^a University of Notre Dame   (United States)

Author keywords

DNA tiling; Electron beam lithography; Molecular electronics; Nanofabrication; Nanotechnology; QCA

Indexed keywords

DNA RAFTS; LIFTOFF OF MOLECULES; MOLECULAR QUANTUM-DOT CELLULAR DOT AUTOMATA (MQCA); QUANTUM CELLULAR AUTOMATA (QCA);

ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; DNA; FINITE AUTOMATA; NANOTECHNOLOGY; POLYMETHYL METHACRYLATES; SEMICONDUCTOR QUANTUM DOTS;

ELECTRON BEAM LITHOGRAPHY;

EID: 20344396890     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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