Investigation of layered SAW sensors based on a WO3/ZNO/64° YX LiNbO3 structure with gold catalytic layer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5650, Issue , 2005, Pages 276-284

  Sivan, Vijay P ^a   Ippolito, S J ^a,b   Kandasamy, S ^a   Kalantar Zadeh, K ^a,b   Wlodarski, W ^a,b   Holland, A ^a  

^a RMIT UNIVERSITY   (Australia)

^b CRC for MicroTechnology ^*  (Australia)

Author keywords

Catalytic; Gas sensor; Gold; Hydrogen; Layered; WO3

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CATALYSIS; DURABILITY; HYDROGEN; LITHIUM NIOBATE; TUNGSTEN COMPOUNDS;

FREQUENCY SHIFTS; HYDROGEN SENSING; ROOM TEMPERATURE; SURFACE ACOUSTIC WAVE (SAW) SENSORS;

CHEMICAL SENSORS;

EID: 20344394923     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.582222     Document Type: Conference Paper

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