High-Q variable inductor using redistributed layers for Si RF circuits

2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers

Volumn , Issue , 2004, Pages 187-190

  Sugawara, Hirotaka ^a   Ito, Hiroyuki ^a   Okada, Kenichi ^a   Itoi, Kazuhisa ^b   Sato, Masakazu ^b   Abe, Hiroshi ^b   Ito, Tatsuya ^b   Masu, Kazuya ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b FUJIKURA LTD   (Japan)

Author keywords

Eddy current; Inductor; MEMS; Quality factor; VCO; WL CSP

Indexed keywords

ACTUATORS; EDDY CURRENTS; ELECTROSTATICS; MAGNETIC FIELDS; MAGNETIC FLUX; MICROELECTROMECHANICAL DEVICES; SILICON; VARIABLE FREQUENCY OSCILLATORS;

PARALLEL-PLATE ACTUATORS; QUALITY FACTOR; SPIRAL INDUCTORS; WL-CSP;

ELECTRIC INDUCTORS;

EID: 20344389751     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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