Overview of calorimeter chips for various applications

Thermochimica Acta

Volumn 432, Issue 2, 2005, Pages 192-201

  Van Herwaarden, A W ^a  

^a Distributieweg 28 ^*  (Netherlands)

Author keywords

Chip calorimeter; High speed calorimetry; Micro calorimeter; Nano calorimeter

Indexed keywords

CALORIMETRY; CHEMICAL ANALYSIS; ENZYMES; HEAT RESISTANCE; METHANOL; MICROPROCESSOR CHIPS; NANOSTRUCTURED MATERIALS; POLYMERIC MEMBRANES; SEMICONDUCTING SILICON; THERMOPILES;

CHIP CALORIMETERS; HIGH SPEED CALORIMETRY; MICRO CALORIMETERS; NANO CALORIMETERS;

CALORIMETERS;

EID: 20344377647     PISSN: 00406031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tca.2005.04.027     Document Type: Conference Paper

References (42)

1. B. Wunderlich, Fast and Super-fast DTA and Calorimetry, in: Proceedings-CD of the 32nd Conference on NATAS, Williamsburg, VA, USA, 4-6 October 2004, pdf-018.
2. P. Bataillard, E. Steffgen, S. Maemmerli, A. Manz, and H.M. Widmer An integrated silicon thermopile as biosensor for the thermal monitoring of glucose, urea and penicillin Biosens. Bioelectron. 8 1993 89 98
3. www.xensor.nl
4. P. Bataillard Calorimetric sensing in bio-analytical chemistry: principles, applications and trends Trends Anal. Chem. 12 1993 387 394
5. A.W. van Herwaarden, P.M. Sarro, J.W. Gardner, and P. Bataillard Liquid and gas micro-calorimeters for (bio)chemical measurements Sens. Actuators A43 1994 24 30
6. www.vivactis.com
7. P.M. Sarro, A.W. van Herwaarden, and W. van der Vlist A silicon-silicon nitride membrane fabrication process fro smart thermal sensors Sens. Actuators A41-42 1994 666 671
8. W. Winter, and G.W.H. Höhne Chip-calorimeter for small samples Thermochim. Acta 403 2003 43 53
9. J. Lerchner, J. Seidel, G. Wolf, and E. Weber Calorimetric detection of organic vapours using inclusion reactions with organic coating materials Sens. Actuators, B 32 1996 71 75
10. J. Lerchner, R. Oehmgen, G. Wolf, P. Le Parlour, and J.-L. Daudon Supermicrocalorimetric devices for the investigation of small samples High Temperatures-High Pressures 30 1998 701 708
11. J. Lerchner, A. Wolf, and G. Wolf Recent developments in integrated circuit calorimetry J. Thermal Anal. Calorimetry 57 1999 241 251
12. D. Caspary, M. Schröpfer, J. Lerchner, and G. Wolf A high resolution IC-calorimeter for the determination of heats of absorption onto thin coatings Thermochim. Acta 337 1999 19 26
13. J. Lerchner, D. Caspary, and G. Wolf Calorimetric detection of volatile organic compounds Sens. Actuators, B 70 2000 57 66
14. J. Lerchner, G. Wolf, C. Auguet, and V. Torra Accuracy in integrated circuit (IC) calorimeters Thermochim. Acta 382 2002 65 76
15. Y.S. Liu, V.M. Ugaz, W.J. Rogers, M.S. Mannan, S.R. Saraf, Development of a nanocalorimeter for material characterization, in: Proceedings-CD of the 32nd Conference on NATAS, Williamsburg, VA, USA, 4-6 October 2004, pdf-111.
16. V. Torra, C. Auguet, J. Lerchner, P. Marinelli, and H. Tachoire Identification of micro-scale calorimetric devices. I. Establishing the experimental rules for accurate measurements J. Thermal Anal. Calorimetry 66 2001 255 264
17. C. Auguet, F. Martorell, F. Moll, and V. Torra Identification of micro-scale calorimetric devices. II. Heat transfer models from two or three-dimensional analysis J. Thermal Anal. Calorimetry 70 2002 277
18. C. Auguet, J. Lerchner, V. Torra, and G. Wolf Identification of micro-scale calorimetric devices III: the 3-D effects J. Thermal Anal. Calorimetry 71 2003 407 419
19. C. Auguet, J. Lerchner, V. Torra, and G. Wolf Identification of micro-scale calorimetric devices. IV. Descriptive models in 3-D J. Thermal Anal. Calorimetry 71 2003 951 966
20. A.W. van Herwaarden Physical principles of thermal sensors Sens. Mater. 8 1996 373 387
21. N. Kerness, A. Koll, A. Schaufelbühl, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes, "N-Well based CMOS Calorimetric Chemical Sensors", in: Proceedings of MEMS 2000, pp. 96-101.
22. M. von Arx, Thermal properties of CMOS thin films, Ph.D. thesis, ETH 12743, 1998, Swiss Federal Institute of Technology, Zurich.
23. M. von Arx, O. Paul, and H. Baltes Test structures to measure the heat capacity of CMOS layer structures, IEEE Tr Semicond. Manufact. 11 1998 217 224
24. 2) Appl. Phys. Lett. 67 1995 1229 1231
25. E.A. Olsen, M.Y. Efremov, M. Zhang, Z. Zhang, and L.H. Allen J. MEMS 12 2003 355 364
26. D.W. Denlinger, E.N. Abarra, K. Allen, P.W. Rooney, M.T. Messer, S.K. Watson, and F. Hellman Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K Rev. Sci. Instrum. 65 1994 946 959
27. B.L. Zink, B. Revaz, R. Sappey, and F. Hellman Thin film microcalorimeter for heat capacity measurements in high magnetic fields Rev. Sci. Instrum. 73 2002 1841 1884
28. P. Ruther, M. Herrscher, O. Paul, A micro differential thermal analysis (μDTA) system, in: Proceedings of the 17th IEEE Conference on MEMS, Maastricht, Jan 2004, pp. 165-168.
29. R. Karmouch, J.-F. Mercure, F. Schietekatte, Nanocalorimeter fabrication procedure and data analysis for investigations on implantation damage annealing, Thermochim. Acta, doi:10.1016/j.tca.2004.12.014.
30. M. Merzliakov Integrated circuit thermopile as a new type of temperature modulated calorimeter Thermochim. Acta 403 2003 65 81
31. S.A. Adamovsky, A.A. Minakov, and C. Schick Scanning microcalorimetry at high cooling rate Thermochim. Acta 403 2003 55 63
32. M. Merzlyakov, and C. Schick IC thermopile as a new type of temperature modulated calorimeter NATAS Notes 34 4 2003 18 21
33. A.A. Minakov, S.A. Adamovsky, C. Schick, Ultra fast calorimetry on controlled cooling and heating up to 10,000 K/s and isothermally with millisecond time resolution (Poster), e-Polymers 2003, available on the web site: http://www.polymers.tudelft.nl/wubweb/Schick-abstract.htm.
34. A.A. Minakov, D.A. Mordvintsev, C. Schick, Reorganization of polymer crystals studied by fast scanning calorimetry, Faraday Discuss. 128 (2005) 261-270.
35. For a complete overview of the work of the group of Prof. Schick, see the web site: www.uni-rostock.de/fakult/manafak/physik/poly/polymerphysics.htm.
36. A.A. Minakov, D.A. Mordvintsev, and C. Schick Polymer 45 11 2004 3755 3763
37. B. Wunderlich, et al., see on WWW URL: http://web.utk.edu/∼athas/ databank/intro.html.
38. K.H. Nitta, and Y. Yamamoto e-Polymers 24 2003 1 11
39. M. Merzlyakov, Method of rapid (10,000 K/s) controlled cooling and heating of thin samples, in: Proceedings-CD of the 32nd Conference on NATAS, Williamsburg, VA, USA, 4-6 October 2004, pdf-027.
40. A.A. Minakov, S.B. Roy, Y.V. Bugoslavsky, L.F. Cohen, Thin-film alternating current nanocalorimeter for low temperatures and high magnetic fields, Rev. Sci. Instrum. 76 (2005) art no. 043906.
41. T. Pijpers, G. V. Poel, R. Tol, C. Schick, V. Mathot, Metastability in polymer systems studied at extreme conditions, including low to very high scanning rates, in: Proceedings-CD of the 32nd Conference on NATAS, Williamsburg, VA, USA, 4-6 October 2004, pdf-019
42. T.F.J. Pijpers, V.B.F. Mathot, B. Goderis, R.L. Scherrenberg, and E.W. van der Vegte High-speed calorimetry for the study of the kinetics of (de)vitrification, crystallization, and melting of macromolecules Macromolecules 35 9 2002 3601