Numerical simulation of thermal wave propagation during laser processing of thin films

Journal of Electronic Materials

Volumn 34, Issue 5, 2005, Pages 583-591

  Ai, X ^a   Li, B Q ^a  

^a Washington State University   (United States)

Author keywords

Pulsed laser diposition; Thermal behavior; Thin films

Indexed keywords

ELECTROMAGNETIC WAVE PROPAGATION; HEAT CONDUCTION; HEAT FLUX; LASER PULSES; ONE DIMENSIONAL; PULSED LASER DEPOSITION; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL CONDUCTIVITY; THERMODYNAMICS;

LASER PROCESSING; TEMPERATURE GRADIENT; THERMAL BEHAVIOR; THERMAL WAVE PROPAGATION;

THIN FILMS;

EID: 20344374973     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0069-6     Document Type: Conference Paper

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