Effect of N2 gas annealing and SiO2 barrier on the optical transmittance and electrical resistivity of a transparent Sb-doped SnO2 conducting film

Journal of Materials Science: Materials in Electronics

Volumn 16, Issue 2, 2005, Pages 71-76

  Lim, Tae Young ^a   Kim, Chang Yeoul ^a   Kim, Bum Suk ^a   Choi, Bong Geun ^b   Shim, KwangBo ^b  

^a Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COATING TECHNIQUES; ELECTRIC CONDUCTIVITY; NITROGEN; OPACITY; SEMICONDUCTING ANTIMONY; SEMICONDUCTING TIN COMPOUNDS; SILICA; SOL-GELS; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANTIMONY DOPED TIN OXIDE; SODA LIME GLASS SUBSTRATE;

CONDUCTIVE FILMS;

EID: 20344363906     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10854-005-6453-4     Document Type: Article

References (14)

1. Z.M. Jarzebski and J.P. Marton, J. Electrochem. Soc. 123 (1976) 199.
2. K.L. Chopra, S. Major and D.K. Pandya, Thin Solid Films 102 (1983) 1.
3. W. Gopel, K.D. Shierbaum and H.D. Weimhofer, Solid State Ion. 32/33 (1989) 440.
4. R.G. Gordon, MRS Bulletin 25 (8) (2000) 52.
5. J.P. Chatelon, C. Terrier and J.A. Roger, J. Sol-Gel Sci. Tech. 10 (1997) 55.
6. C. Terrier, J.P. Chatelon and J.A. Roger, Thin Solid Films 295 (1997) 95.
7. Idem., J. Sol-Gel Sci. Tech. 10 (1997) 75.
8. M. Pechini, US Patent 3,330,697 (1967).
9. M.I.B. Bernard, E. Longo and J.A. Varela, Thin Solid Films 405 (2002) 228.
10. C.J. Brinker and G.W. Schere "Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing" (Academic Press Boston, 1990) p. 790.
11. C. Terrier, J.P. Chatelon and J.A. Roger, Thin Solid Films 263 (1995) 40.
12. T.M. Racheva and G.W. Critchlow, ibid. 292 (1997) 299.
13. J. Szuber, G. Czempik and B. Adanovicz, ibid. 391 (2001) 198.
14. Y. Inoue, M. Nomiya and O. Takaki, Vacuum 51 (1998) 673.