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Volumn 20, Issue 3, 2005, Pages 545-549

Thermal isolation with porous silicon technology and the application in the micro-sensors

Author keywords

Micro sensor; Porous silicon; Thermal conductivity; Thermal isolation

Indexed keywords

POROSITY; POROUS MATERIALS; SILICON SENSORS; THERMAL CONDUCTIVITY; THERMAL INSULATION; THERMOOXIDATION;

EID: 20144380939     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review
Times cited : (2)

References (20)
  • 10
    • 0030449421 scopus 로고    scopus 로고
    • Chen G. J. Heat Transfer, 1996, 118(3): 539-545.
    • (1996) J. Heat Transfer , vol.118 , Issue.3 , pp. 539-545
    • Chen, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.