Gas flow modeling for focused ion beam (FIB) repair processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5567, Issue PART 1, 2004, Pages 467-476

  El Morsi, Mohamed S ^a   Wei, Alexander C ^a   Nellis, Gregory F ^a   Engelstad, Roxann L ^a   Sijbrandij, Sybren ^b   Stewart, Diane ^b   Mulders, Hans ^b  

^a University of Wisconsin Madison   (United States)

^b Thermo Fisher Scientific   (United States)

Author keywords

Computational fluid dynamics; Focused Ion Beam; Slip walls

Indexed keywords

FOCUSED ION BEAMS (FIB); GAS DELIVERY SYSTEM; GAS FLOW MODELING; SLIP WALLS;

COMPUTATIONAL FLUID DYNAMICS; COOLING; CRYOGENICS; ICE; MASKS; OPTIMIZATION; REPAIR; SYSTEMS ANALYSIS;

ION BEAMS;

EID: 20044394788     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.570268     Document Type: Conference Paper

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