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Volumn 484, Issue 1-2, 2005, Pages 278-282
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Sol-gel fabrication of GeO2/ormosils organic-inorganic hybrid material channel waveguides
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Author keywords
Deposition process; Optical coating; Optical properties; Reactive ion etching
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FIBER BRAGG GRATINGS;
HEAT TREATMENT;
OPTICAL COATINGS;
REACTIVE ION ETCHING;
REFRACTIVE INDEX;
SOL-GELS;
SPIN COATING;
THIN FILMS;
WAVEGUIDES;
CHANNEL WAVEGUIDES;
DEPOSITION PROCESS;
ROOT MEAN SQUARE (RMS);
TRANSVERSE ELECTRIC (TE) POLARIZATION;
GERMANIUM COMPOUNDS;
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EID: 19944387303
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2005.03.009 Document Type: Article |
Times cited : (13)
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References (15)
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