Photoluminescence of Yb3+/Er3+ co-doped Al2O3 film fabricated by medium frequency sputter

Guangdianzi Jiguang/Journal of Optoelectronics Laser

Volumn 15, Issue 10, 2004, Pages

  Gao, Jing Sheng ^a   Song, Chang Lie ^a   Li, Cheng Ren ^a   Li, Shu Feng ^a   Song, Qi ^a   Huang, Kai Yu ^a   Li, Guo Qing ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Anneal; Medium frequency sputter; Photoluminescence; Yb3+ Er3+ co doped

Indexed keywords

ALUMINA; ANNEALING; ERBIUM; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SURFACE TOPOGRAPHY; YTTERBIUM;

MEDIUM FREQUENCY SPUTTER; PUMP POWER;

OPTICAL FILMS;

EID: 19944366921     PISSN: 10050086     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. 3 waveguides on silicon[J]. Appl Phys Lett., 1996, 68(14): 1886-1888.
2. Van den Hoven G N, et al. Photoluminescence characterization of Er-implanted films[J]. Appl Phys Lett., 1993, 62(24): 3065-3067.
3. 3 thin films with large erbium concentrations[J]. J Appl Phys Lett., 2001, 90: 5120-5125.
4. 3 thin films by plasma-enhanced chemical vapor deposition exhibiting a 55 nm optical bandwidth[J]. IEEE Journal of Quantum Electronics, 1998, 34: 282-284.
5. McFarlane Ross A, Lui Mark, Yap Daniel. Rare earth doped fluoride waveguides fabricated using molecular beam epitaxy[J]. IEEE Journal of Selected Topics in Quantum Electronics, 1995, 1(1): 82-91.
6. 3 planar waveguide fabricated by sol-gel processes[J]. Thin Solid Films, 2000, 370: 243-247.
7. Hou Yaqi, Zhuang Daming, Zhang Gong, et al. Growth and properties of titanium oxide film by medium frequency alternative reactive magnetron sputtering[J]. Vacuum Science and Technology, 2001, (6): 457-460. (in Chinese)
8. 2 by medium frequency reactive dual magnetron sputtering[J]. Vacuum, 2003, (1): 17-20. (in Chinese)
9. 2[J]. Materials Science and Engineering, 2001, 3-8.
10. 3+ co-doped phosphate glasses[J]. Chinese Journal of Lasers. 2001, 28(5): 467-470. (in Chinese)
11. 3+ doped laser glasses[J]. Journal of Optoelectronics · Laser, 2003, 14(4): 380-382. (in Chinese)
12. XU Fei, XIAO Zhi-song, CHENG Guo-an, et al. Photoluminescence around 1.54 μm wavelength from erbium-doped silicon dependence on annealing temperature[J]. Nuclear techniques, 2002, 25(8): 631-636. (in Chinese)