An instrument for surface roughness measurement of optical thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5638, Issue PART 2, 2005, Pages 638-641

  Hou, Haihong ^a   Yi, Kui ^a   Shao, Jianda ^a   Fan, Zhengxiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Optical thin films; Roughness; Total integrated scattering

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; COMPUTATIONAL COMPLEXITY; FUNCTIONS; INTEGRATED OPTICS; LIGHT SCATTERING; MATHEMATICAL MODELS; ROUGHNESS MEASUREMENT; SURFACE MEASUREMENT; SURFACES; THIN FILMS;

ANGLE RESOLVED SCATTERING (ARS); OPTICAL THIN FILMS; SURFACE ROUGHNESS MEASUREMENT; TOTAL INTEGRATED SCATTERING (TIS);

OPTICAL FILMS;

EID: 19844368342     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.572611     Document Type: Conference Paper

References (8)

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