Ultrahigh temperature vibration sensors using aluminum nitride thin films and WRu multilayer electrodes

Applied Physics Letters

Volumn 86, Issue 2, 2005, Pages

  Akiyama, Morito ^a   Kamohara, Toshihiro ^a   Nishikubo, Keiko ^a   Ueno, Naohiro ^a   Nagai, Hideaki ^a   Okutani, Takeshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ELECTRODES; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; MULTILAYERS; RUTHENIUM; SCANNING ELECTRON MICROSCOPY; TEMPERATURE MEASUREMENT; THIN FILMS; TUNGSTEN; VIBRATION MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

BOTTOM ELECTRODES; MULTILAYER ELECTRODES; VIBRATION SENSORS; VIBRATORY MEASUREMENTS;

SENSORS;

EID: 19744383233     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1850193     Document Type: Article

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