Undoped and 0.1 wt.% Ca-doped Pt-catalyzed SnO2 sensors for CH4 detection

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 119-124

  Min, Bong Ki ^a   Choi, Soon Don ^a  

^a Yeungnam University   (South Korea)

Author keywords

Ca doped; Ion beam sputtering; Long term stability; Methane sensor; Pt catalyzed

Indexed keywords

CALCIUM; CATALYSIS; METHANE; PLATINUM; SPUTTERING; THIN FILMS; TIN COMPOUNDS;

CA-DOPED; ION BEAM SPUTTERING; LONG-TERM STABILITY; METHANE SENSOR; PT-CATALYZED;

SENSORS;

EID: 19744379730     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.12.112     Document Type: Conference Paper

References (36)

1. K. Ihokura, and J. Watson The Stannic Oxide Gas Sensor, Principles and Application 1994 CRC Press Ann Arbor, USA pp. 79-89
2. 2 J. Electrochem. Soc. Jpn. 58 1990 1143 1148
3. N. Yamazoe New approaches for improving semiconductor gas sensors Sens. Actuat. B 5 1991 7 19
4. 2 sensors Sens. Actuat. B 77 2001 335 338
5. 2 ultra-fine particles by additives J. Mater. Sci. 27 1993 963 971
6. N.S. Baik, G. Sakai, N. Miura, and N. Yamazoe Preparation of stabilized nanosized tin oxide particles by hydrothermal treatment J. Am. Ceram. Soc. 83 12 2000 2983 2987
7. 2 gas sensor Sens. Actuat. 44 1988 223 232
8. 2 gas sensors Technical Digest of the Ninth Sensor Symposium 1990 91 94
9. J.R. McNeil, J.J. McNally, and P.D. Reader Ion beam deposition K.K. Schuegraf Handbook of Thin-film Deposition Processes and Techniques 1988 Noyes Publications New Jersey, USA 364 392
10. 2 as solid state gas sensors J. Electron. Mater. 9 1 1980 29 48
11. 2 films J. Electron. Mater. 10 1981 455 472
12. 2 thin-film gas sensors fabricated by using dual ion beam sputtering Sens. Actuat. B 77 2001 200 208
13. 2 detection Sens. Actuat. B 24/25 1995 529 531
14. 2 gas sensors on Si substrates Sens. Actuat. B 22 1994 115 119
15. K.D. Schierbaum, S. Vaihinger, and W. Gopel Prototype structure for systematic investigation of thin-film gas sensors Sens. Actuat. B1 1990 171 175
16. L. Sangaletti, L.E. Depero, A. Dieguez, G. Marca, J.R. Morante, A. Romano-Rodriguez, and G. Sberveglieri Microstructure and morphology of tin dioxide multiplayer thin film gas sensors Sens. Actuat. B 44 1997 268 274
17. 2 thin polycrystalline films doped by ion implantation Sens. Actuat. B 15/16 1993 406 409
18. 2 thin-film gas sensors due to gold diffusion Sens. Actuat. 2 1981/1982 139 147
19. 2 thin-film gas sensors in single chip packages Sens. Actuat. B 26/27 1995 64 67
20. 2 gas sensors Sens. Actuat. B 6 1992 239 247
21. 2 gas sensors Sens. Actuat. B 9 1992 215 219
22. U. Dibbern, G. Kuersten, and P. Willich Gas sensitivity, sputter conditions and stoichiometry of pure tin oxide layer Proceedings of the Second International Meeting on Chemical Sensors Bordeaux, France, July 7-10 1986 127 130
23. 2 sputtered film gas sensor Nat. Tech. Rep. 29 1983 137 144
24. H.P. Hubner, and S. Drost Tin oxide gas sensors: an analytical comparison of gas-sensitive and non gas-sensitive thin films Sens. Actuat. B 4 1991 463 466
25. 2 gas sensors Sens. Actuat. B 3 1991 69 74
26. x thin films Sens. Actuat. B1 1991 176 181
27. J.W. Gardner, H.V. Shurmer, and P. Corcoran Integrated tin oxide sensors Sens. Actuat. B 4 1991 117 121
28. x conductance modulation carbon monoxide sensors J. Electrochem. Soc. 126 1979 627 633
29. 2 film with Pd and PdO deposits Sens. Actuat. B1 1990 176 181
30. 2 thin film gas sensor fabricated by ion beam sputtering Sens. Actuat. B 98 2004 239 246
31. 2 sensors Sens. Actuat. B 77 2001 335 338
32. N. Yamazoe, Y. Kurokawa, and T. Seiyama Effect of additives on semiconductor gas sensors Sens. Actuat. 4 1983 283 289
33. K. Ihokura, and J. Watson The Stannic Oxide Gas Sensor, Principles and Application 1994 CRC Press Ann Arbor, USA pp. 53-54
34. K. Ihokura, and J. Watson The Stannic Oxide Gas Sensor, Principles and Application 1994 CRC Press Ann Arbor, USA pp. 49-50
35. N. Yamazoe New approaches for improving semiconductor gas sensors Sens. Actuat. B 135 1991 7 19
36. 2 Sens. Actuat. B 99 2004 288 296