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0000913115
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note
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3:Sn substrates in an atmosphere of argon and oxygen. The total pressure during sputtering was 30 mTorr for the case of tungsten and 60 mTorr for the case of titanium. The oxygen/argon ratios in the gas were 1.25 and 0.086, respectively. Other details about the sputtering conditions are given in A. Azens et al., Appl. Phys. Lett. 68, 3701 (1996); J. Appl. Phys. 78, 1968 (1995). For comparison purposes, films of crystalline tungsten trioxide were deposited by heating the substrates to 350 °C during the deposition.
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17
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0000913115
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3:Sn substrates in an atmosphere of argon and oxygen. The total pressure during sputtering was 30 mTorr for the case of tungsten and 60 mTorr for the case of titanium. The oxygen/argon ratios in the gas were 1.25 and 0.086, respectively. Other details about the sputtering conditions are given in A. Azens et al., Appl. Phys. Lett. 68, 3701 (1996); J. Appl. Phys. 78, 1968 (1995). For comparison purposes, films of crystalline tungsten trioxide were deposited by heating the substrates to 350 °C during the deposition.
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Azens, A.1
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18
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0029357806
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3:Sn substrates in an atmosphere of argon and oxygen. The total pressure during sputtering was 30 mTorr for the case of tungsten and 60 mTorr for the case of titanium. The oxygen/argon ratios in the gas were 1.25 and 0.086, respectively. Other details about the sputtering conditions are given in A. Azens et al., Appl. Phys. Lett. 68, 3701 (1996); J. Appl. Phys. 78, 1968 (1995). For comparison purposes, films of crystalline tungsten trioxide were deposited by heating the substrates to 350 °C during the deposition.
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19
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0000913115
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note
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3:Sn substrates in an atmosphere of argon and oxygen. The total pressure during sputtering was 30 mTorr for the case of tungsten and 60 mTorr for the case of titanium. The oxygen/argon ratios in the gas were 1.25 and 0.086, respectively. Other details about the sputtering conditions are given in A. Azens et al., Appl. Phys. Lett. 68, 3701 (1996); J. Appl. Phys. 78, 1968 (1995). For comparison purposes, films of crystalline tungsten trioxide were deposited by heating the substrates to 350 °C during the deposition.
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20
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85088490392
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note
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α cathode, showed that the films deposited onto unheated substrates were x-ray amorphous, while the crystalline tungsten trioxide films were found to be monoclinic with a grain size of ∼50 nm, as obtained from peak profile fittings using Scherrer's equation [18].
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