Deposition and characterization of MOCVD Pt film as a top electrode for high dielectric film

Journal of the Korean Physical Society

Volumn 32, Issue 4 SUPPL., 1998, Pages

  Lee, Jong Myeong ^a   Shin, Ju Cheol ^a   Kim, Kwon Seok ^a   Cho, Ho Jin ^a   Kim, Hyeong Joon ^a   Hwang, Cheol Seong ^b   Suk, Chang Gil ^c  

^a Seoul National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c R and D Center   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 19444386266     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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6. STREM Chemicals Inc., Catalog No. 16, 197 (1995).