Epitaxial growth of void free β-SiC on Si by the pyrolysis of tetramethylsilane

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Seo, Young Hun ^a   Nahm, Kee Suk ^a,a   Kim, Kwang Chul ^a   Shim, Hyun Wuk ^a   Suh, Eun Kyung ^a   Lee, Hyung Jae ^a  

^a Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 19444383683     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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