The laser trapping probe for nano-CMM (1st report) - Positional detection principle of the laser trapping probe and its nature

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 66, Issue 7, 2000, Pages 1081-1086

  Takaya, Yasuhiro ^a   Sato, Noriaki ^a   Takahashi, Satoru ^a   Miyoshi, Takashi ^a   Shimizu, Hiroki ^a   Watanabe, Manjiro ^a  

^a NONE

Author keywords

Laser trapping; Linnik interferometer; Microparts; Microprobe; Nano CMM; Positional detection probe

Indexed keywords

EID: 4644334630     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.66.1081     Document Type: Article

References (13)

1. K. Takamasu et al. : Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Proc. Japan-China Bilateral Symp. Advanced Manufacturing Engineering, (1996) 155.
2. G. N. Peggs, A. J. Lewis and S. Oldfield: Design for a Compact High-Accuracy CMM, Ann. CIRP, 48/1 (1999) 417.
3. A. Ashkin : Acceleration and Trapping of Particles by Rradiation Pressure, Phys. Rev. Lett., 24, 4 (1970) 156.
4. A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm and S. Chu : Observation of a Single-beam Gradient Force Optical Trap for Dielectric Particles, Opt. Lett., 11, (1986) 288.
5. A. Ashkin: Forces of a Single-beam Gradient Laser Trap on a Dielectric Sphere in the Ray Optics Regime, Biophys. J., 61, (1992) 569.
6. C. J. R. Sheppard and K. G. Larkin : Effect of Numerical Aperture on Interference Fringe Spacing, Appl. Opt., 34, 22, (1995) 4731.
7. K. L. Johnson, K. Kendall and A. D. Roberts : Surface Energy and the Contact of Elastic Solids, Proc. R. Soc. Lond. A., 324, (1971) 301.
8. R. Omori, T. Kobayashi and A. Suzuki : Observation of a Single-beam Gradient-force Optical Trap for Dielectric Particles in Air, Opt. Lett., 22, 11 (1997) 816.