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Volumn 49, Issue , 2002, Pages 211-219
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Improvement of LiNbO3 surface roughness by using a multi-step process: Relationship between optical and AFM analysis
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Author keywords
LiNbO3; Optical prism coupling; Sputtering; Surface roughness
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DEPOSITION;
EPITAXIAL GROWTH;
MORPHOLOGY;
SPUTTERING;
SURFACE ROUGHNESS;
FILM THICKNESS;
OPTICAL INFORMATIONS;
OPTICAL PRISM COUPLING;
LITHIUM COMPOUNDS;
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EID: 1942545050
PISSN: 10584587
EISSN: 16078489
Source Type: Conference Proceeding
DOI: 10.1080/10584580215484 Document Type: Article |
Times cited : (1)
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References (9)
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