Development of mechanical stress in fluoride multi-layers for UV - Applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 127-136

  Thielsch, Roland ^a   Heber, Joerg ^b   Uhlig, Hein ^b   Kaiser, Norbert ^b  

^a Southwall Europe GmbH   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Coating; Fluoride; Mechanical properties; Optical properties; Stress; Structural properties; UV

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACKS; FLUORINE; MIRRORS; MULTILAYERS; THERMAL STRESS; THERMOELASTICITY; THIN FILMS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

DEEP ULTRAVIOLET (DUV); FLUORIDE;

OPTICAL COATINGS;

EID: 1942502833     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.512952     Document Type: Conference Paper

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