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Volumn 57-58, Issue , 2001, Pages 989-993
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Coulomb-blockade-structures in poly-crystalline silicon
a a a a |
Author keywords
Coulomb blockade; Electron beam lithography; Single electron transistor
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COULOMB BLOCKADE;
DOPING (ADDITIVES);
ELECTRIC POTENTIAL;
ELECTRON BEAM LITHOGRAPHY;
GRAIN BOUNDARIES;
MOSFET DEVICES;
SILICON;
SINGLE ELECTRON TRANSISTORS;
POLYCRYSTALLINE MATERIALS;
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EID: 19244369857
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(01)00429-4 Document Type: Article |
Times cited : (3)
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References (12)
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