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Volumn 57-58, Issue , 2001, Pages 989-993

Coulomb-blockade-structures in poly-crystalline silicon

Author keywords

Coulomb blockade; Electron beam lithography; Single electron transistor

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COULOMB BLOCKADE; DOPING (ADDITIVES); ELECTRIC POTENTIAL; ELECTRON BEAM LITHOGRAPHY; GRAIN BOUNDARIES; MOSFET DEVICES; SILICON;

EID: 19244369857     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00429-4     Document Type: Article
Times cited : (3)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.