Design and measurement of RF-MEMS CPW on HRS

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 13, Issue 2, 2005, Pages 158-164

  Liu, Ze Wen ^a   Xuan, Yun ^a   Lei, Xiao Feng ^a   Li, Zhi Jian ^a   Liu, Li Tian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Characteristic impedance; Coplanar waveguide; Micro electro mechanical system; Radio frequency

Indexed keywords

ELECTRIC IMPEDANCE; FREQUENCIES; MEASUREMENTS; MICROELECTROMECHANICAL DEVICES; RADIO; SILICON;

CHARACTERISTIC IMPEDANCE; CONFORMAL MAPPING METHOD; COPLANAR WAVEGUIDE; HIGH RESISTIVITY SILICON; PARTIAL CAPACITANCE METHOD;

WAVEGUIDES;

EID: 19044366485     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. ZHOU Z Y, YE X Y, CUI T H, et al. Microtechnology/Nanotechnology and MEMS[J]. Optics and Precision Engineering, 1998, 6(1): 1-7.
2. RASTOGI A K, HARDIKAR S. Characteristics of CPW with thick metal coating[C]. Infrared and Millimeter Waves, 2002. Conference Digest, Twenty Seventh International Conference, 2002: 345-346.
3. GEPUTA K C, GAGE R, CHADEHA R. Computer aided design of microwave circuit[M]. Beijing: Science and Technology Press, 1986: 43-45. (in Chinese)
4. MILANOVIC V, GAITAN M, BOWEN E D, et al. Micromachined microwave transmission lines in CMOS technology[J]. IEEE Transactions on Microwave Theory and Techniques, 1997, 45(5): 630-635.
5. LI W, SHI Y L. Loss performance of CPW with thick polyimide on low-resistivity Si[J]. Research and Progress of SSE, 2003, 23(3): 306-310. (in Chinese)
6. REYES A C, EL-GHAZALY S M. Silicon as a microwave substrate, microwave symposium digest[J]. IEEE MTT-S International, 1994, 3: 1759-1762.
7. REBEIZ G M. RF MEMS: theory, design, and technology[M]. John Wiley and Sons, 366-367.
8. HUANG Y. Calculation of microwave parameters of CPW with a buffer layer[C]. 2002 3rd International Conference on Microwave and Millimeter Wave Technology Proceedings, 2002: 875-878.
9. 3 interferometric modulators[J]. IEEE Journal of Quantum Electronics, 1991, 27(3): 608-617.
10. WINKEL T M, DUTTA L S, GRABINSKI H. An accurate determination of the characteristic impedance of lossy lines on chips based on high frequency S-parameter measurement[C]. Multi-Chip Module Conference, 1996. MCMC-96, Proceedings, 1996 IEEE, 1996: 190-195.
11. EISENSTADT W R, Eo Y. S-parameter based IC interconnect transmission line characterization[J]. IEEE Transactions on Components, Hybrid, Manufacturing Technology, 1992, 15: 483-490.
12. WILLIAMS D F, MARKS R B. Accurate transmission line characterization[J]. IEEE Microwave and Guided Wave Letters, 1993, 3(8): 247-24.