Three-dimensional silicon-based photonic crystals fabricated by electrochemical etching

2004 1st IEEE International Conference on Group IV Photonics

Volumn , Issue , 2004, Pages 168-170

  Matthias, S ^a   Muller F ^a   Hillebrand, R ^a   Schilling, J ^a   Gosele U ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDS; CURRENT VOLTAGE CHARACTERISTICS; ELECTROCHEMISTRY; ELECTROMAGNETISM; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LATTICE CONSTANTS; OPTICAL WAVEGUIDES; PERMITTIVITY; PHOTOCHEMICAL REACTIONS; PHOTONS; SILICA; SILICON WAFERS;

ELECTROCHEMICAL ETCHING; MACROPOROUS SILICON; PHOTONIC BANDGAP; THREE-DIMENSIONAL SILICON-BASED PHOTONIC CRYSTALS;

CRYSTALS;

EID: 18844430029     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

1. A. Chutinan, S. John, and O. Toader. Diffractionless flow of light in all-optical microchips. Phys. Rev. Lett., 90(12): 123901, 2003.
2. A. Blanco et. al. Large scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometers. Nature, 405:437, 2000.
3. S. John. Strong localization of photons in certain disordered dielectric superlattices. Physical Review Letters, 58(23):2486, 1987.
4. Y.-J. Lee and P. V. Braun. Tunable inverse opal hydrogen ph sensors. Advanced Materials, 15(7-8):563, 2003.
5. V. Lehmann. The physics of macropore formation in low doped n-type silicon. Journal of the Electrochemical Society, 140:2836, 1993.
6. V. Lehmann and H. Foil. Formation mechanism and properties of electrochemically etched trenches in n-type silicon. Journal of the Electrochemical Society, 137:653, 1990.
7. V. Lehmann and U. Grüning. The limits of macropore array fabrication. Thin Solid Films, 297:13, 1997.
8. S. W. Leonard. Complete three-dimensional band gap in macroporous silicon photonic crystals. Applied Physics Letters, 81(16):2917, 2002.
9. S. E. Létant, B. R. Hart, A. W. van Buuren, and L. J. Terminello. Functionalized silicon membranes for selective bioorganism capture. Nature Materials, 2(6):391, 2003.
10. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and J. Bur. A three-dimensional photonic crystal operating at infrared wavelengths. Nature, 394:251, 1998.
11. S. Matthias and F. Müller. Asymmetric pores in a silicon membrane acting as massively parallel brownian ratchets. Nature, 424:53, 2003.
12. F. Müller, A. Birner, J. Schilling, U. Gösele, Ch. Kettner, and P. Hänggi. Membranes for micropumps from macroporous silicon, physical status solidi (a), 182:585, 2000.
13. S. Noda, K. Tomoda, N. Yamamoto, and A. Chutinan. Full three-dimensional photonic bandgap crystals at near-infrared wavelengths. Science, 289:604, 2000.
14. J. Schilling, F. Müller, S. Matthias, R. B. Wehrspohn, U. Gösele, and K. Busch. Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter. Applied Physics Letters, 78(9): 1180, 2001.
15. J. Schilling, F. Müller, R. B. Wehrspohn, U. Gösele, and K. Busch. Dispersion relation of 3d photonic crystals based on macroporous silicon. MRS Symp. Proc., 722(L6.8):455, 2002.
16. J. E. G. J. Wijnhoven and W. L. Vos. Preparation of photonic crystals made of air spheres in titania. Science, 281:802, 1998.
17. E. Yablonovitch. Inhibited spontaneous emission in solid-state physics and electronics. Physical Review Letters, 58(20):2059, 1987.