Room-temperature chemisorption and thermal evolution of perchloroethylene and trichloroethylene on Si(1 1 1)7 × 7: Formation of chlorinated vinylene and vinylidene and acetylide adspecies, and thermal etching reactions

Surface Science

Volumn 583, Issue 2-3, 2005, Pages 179-190

  He, Zhenhua ^a   Leung, K T ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Chemisorption; Chloroethylenes; Dechlorination; Electron energy loss spectroscopy; Si(1 1 1)7 7; Thermal desorption spectrometry

Indexed keywords

CHEMISORPTION; DECHLORINATION; DESORPTION; ELECTRON ENERGY LOSS SPECTROSCOPY; ETCHING; SILICON;

ACETYLIDE ADSPECIES; CHLOROETHYLENE; ETCHING REACTIONS; THERMAL DESORPTION SPECTROMETRY;

ETHYLENE;

EID: 18844428811     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2005.03.037     Document Type: Article

References (43)

1. M.B. Moran, and L.F. Johnson Mater. Res. Soc. Sympos. Proc. 609 2000 A23.2
2. Q.A. Huang, J.N. Chen, H.Z. Zhang, and Q.Y. Tong Jpn. J. Appl. Phys., Part 1 32 1993 2854
3. A.K Hochberg, A. Lagendijk, D.A. Roberts, R. Agny, B. Anders, R. Cotner, J. Jewett, J. Mulready, and M. Tran J. Electrochem. Soc. 139 1992 L117
4. I.W. Boyd, and R.B. Jackman Photochemical processing of electronic materials second ed. 1992 Academic London
5. W. Sesselman, and T.J. Chuang J. Vac. Sci. Technol. B3 1985 1507
6. X.H. Chen, J.C. Polanyi, and D. Rogers Surf. Sci. 376 1997 77
7. Y. Cao, J.F. Deng, and G.Q. Xu J. Chem. Phys. 112 2000 4759
8. P.H. Lu, J.C. Polanyi, and D. Rogers J. Chem. Phys. 111 1999 9905
9. P.H. Lu, J.C. Polanyi, and D. Rogers J. Chem. Phys. 112 2000 11005
10. Z.H. He, X. Yang, X.J. Zhou, and K.T. Leung Surf. Sci. 547 2003 L840
11. X.J. Zhou, Q. Li, Z.H. He, X. Yang, and K.T. Leung Surf. Sci. 543 2003 L668
12. R.A. Doong, K.T. Chen, and H.C. Tsai Environ. Sci. Technol. 37 2003 2575
13. D.Q. Hu, Ph.D. thesis, University of Waterloo, Waterloo, 1993
14. J.E. Demuth, B.N.J. Persson, and A.J. Schell-Sorokin Phys. Rev. Lett. 51 1983 2214
15. U. Backes, and H. Ibach Solid State Commun. 40 1981 575
16. B.N.J. Persson, and J.E. Demuth Phys. Rev. B 30 1984 5968
17. T. Shimanouchi, Tables of molecular vibrational frequencies consolidated volume I, National Bureau of Standards, Gaithersburg, 1972, p. 1
18. K.S. Pitzer, and J.L. Hollenberg J. Am. Chem. Soc. 76 1954 1439
19. G. Allen, and H.J. Berstein Can. J. Chem. 32 1954 1044
20. T.J. Houser, R.B. Berstein, R.G. Miekka, and J.C. Angus J. Am. Chem. Soc. 77 1955 6201
21. J. Schmidt, C. Stuhlmann, and H. Ibach Surf. Sci. 302 1994 10
22. Q. Gao, C.C. Cheng, P.J. Chen, W.J. Choyke, and J.T. Yates Jr. J. Chem. Phys. 98 1993 8308
23. J.M. Buriak Chem. Rev. 102 2002 1271
24. R.T. Sanderson Polar covalence 1983 Academic New York
25. R.T. Sanderson Chemical bonds and bond energy second ed. 1976 Academic New York
26. M.X. Yang, S. Sarkar, B.E. Bent, S.R. Bare, and M.T. Holbrook Langmuir 13 1997 229
27. J. Yoshinobu, D. Fukushi, M. Uda, E. Nomura, and M. Aono Phys. Rev. B 46 1992 9520
28. S.Y. Tong, H. Huang, C.M. Wei, W.E. Pachard, F.K. Men, G. Glander, and M.B. Webb J. Vac. Sci. Technol. A 6 1988 615
29. D.R. Lide CRC handbook of chemistry and physics 85th ed. 2005 CRC Press Boca Raton
30. H. Ibach, H.D. Bruchmann, and H. Wagner Appl. Phys. A 29 1982 113
31. J.J. Boland, and J.S. Villarrubia Science 248 1990 838
32. Eight Peak Index of Mass Spectra, vol. 1, Mass Spectrometry Data Center, Aldermaston, 1974
33. P.A. Coon, P. Gupta, M.L. Wise, and S.M. George J. Vac. Sci. Technol. A 10 1992 324
34. D.D. Koleske, S.M. Gates, and D.B. Beach J. Appl. Phys. 72 1992 4073
35. K.H. Junker, G. Hess, J.G. Eherdt, and J.M. White J. Vac. Sci. Technol. A 16 1998 2995
36. H. Ibach, H. Wagner, and D. Bruchmann Solid State Commun. 42 1982 457
37. S.C. Laroze, S. Haq, R. Raval, Y. Jugnet, and J.C. Bertolini Surf. Sci. 433-435 1999 193
38. J. Yoshinobu, H. Tsuda, M. Onchi, and M. Nishijima Solid State Commun. 60 1986 801
39. Y. Jugnet, J.C. Bertolini, L.A.M.M. Barbosa, and P. Sautet Surf. Sci. 505 2002 153
40. L.A.M.M. Barbosa, and P. Sautet J. Catal. 207 2002 127
41. H.N. Waltenburg, and J.T. Yates Jr. Chem. Rev. 95 1995 1589
42. K. Oura, V.G. Lifshits, A.A. Saranin, A.V. Zotov, and M. Katayama Suf. Sci. Rep. 35 1999 1
43. R.M. Wallace, P.A. Taylor, W.J. Choyke, and J.T. Yates Surf. Sci. 239 1990 1