Operating modes of an atmospheric pressure radio frequency plasma

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 I, 2005, Pages 294-295

  Yang, Xiawan ^a   Moravej, Maryam ^a   Nowling, Gregory R ^a   Chang, Jane P ^a   Hicks, Robert F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

mode; mode; Atmospheric pressure plasma; Radio frequency

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC BREAKDOWN; ELECTRIC DISCHARGES; ELECTRODES; HELIUM; LOW TEMPERATURE PROPERTIES; NITROGEN; PLASMA DENSITY; PLASMA SHEATHS; PLASMAS; RADIO WAVES;

ATMOSPHERIC PRESSURE PLASMA; OPERATING MODES; RADIO FREQUENCY PLASMA;

WAVE PLASMA INTERACTIONS;

EID: 18844424049     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845057     Document Type: Article

References (4)

1. M. Moravej, S. E. Babayan, G. R. Nowling, X. Yang, and R. F. Hicks, "Plasma enhanced chemical vapor deposition of hydrogenated amorphous silicon at atmospheric pressure," Plasma Sources Sci. Technol., vol. 13, pp. 8-14, 2004.
2. S. E. Babayan, G. Ding, and R. F. Hicks, "Determination of the nitrogen atom density in the afterglow of a nitrogen and helium, nonequilibrium, atmospheric pressure plasma," Plasma Chem. Plasma Process., vol. 21, pp. 505-521, 2001.
3. X. Yang, M. Moravej, G. R. Nowling, S. E. Babayan, J. Penelon, J. P. Chang, and R. F. Hicks, "Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes," Plasma Sources Sci. Technol., to be published.
4. Y. P. Raizer, M. N. Shneider, and N. A. Yatsenko, Radio-Frequency Capacitive Discharges. Boca Raton, FL: Chemical Rubber Corp., 1995.