Molecule formation in N and O containing plasmas

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 I, 2005, Pages 390-391

  van Helden, J H ^a   Zijlmans, R ^a   Engeln, R ^a   Schram, D C ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHARGE TRANSFER; LIGHT EMISSION; MOLECULAR DYNAMICS; MONOMERS; NITROGEN; OXYGEN; PLASMA SOURCES; SPECTRUM ANALYSIS; SURFACE TREATMENT;

DISSOCIATIVE RECOMBINATION; MOLECULE FORMATION; NITROGEN PLASMA;

PLASMA INTERACTIONS;

EID: 18844390240     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845903     Document Type: Article

References (3)

1. 2 plasma," J. Vac. Sci. Technol. B, vol. 21, pp. 61-66, 2003.
2. M. Capitelli, C. M. Ferreira, B. F. Gordiets, and A. I. Osipov, Plasma Kinetics in Atmospheric Gases. Berlin, Germany: Springer-Verlag, 2000.
3. +) in a low-temperature nitrogen plasma," Chem. Phys. Lett., vol. 290, pp. 379-384, 1998.