Microscopic characterization of ablation craters produced by femtosecond laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue II, 2002, Pages 1032-1039

  Temnov, V V ^a   Sokolowski Tinten, K ^a   Stojanovic, N ^a   Kudryashov, S ^a   Von der Linde, D ^a   Kogan, B ^a   Schlarb, A ^a   Weyers, B ^a   Moller R ^a   Seekamp, J ^b   Sotomayor Torres, C ^b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Laser ablation; Laser surface modification

Indexed keywords

ATOMIC FORCE MICROSCOPY; IRRADIATION; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR MATERIALS; SURFACE TREATMENT; ULTRASHORT PULSES;

LASER SURFACE MODIFICATION;

LASER ABLATION;

EID: 18744415690     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482062     Document Type: Conference Paper

References (9)

1. K. Sokolowski-Tinten et al., "Transient states of matter during short pulse laser ablation," Phys. Rev. Lett. 81, pp. 224-227, 1998.
2. D. von der Linde and K. Sokolowski-Tinten, "Physical mechanisms of short pulse laser ablation," Appl. Surf. Sci. 154/155, pp. 1-10, 2000.
3. V.V. Zhakhovskij et al., "Molecular-dynamics simulation of rarefaction waves in media that can undergo phase transitions," JETP Lett. 71, pp. 167-172, 2000.
4. http://www.ilp.physik.uni-essen.de/vonderLinde/Forschung/Research.html.
5. R. Yen, J.M. Liu, H. Kurz, and N. Bloembergen, "Space-time resolved reflectivity measurements of picosecond laser-pulse induced phase transitions in (111) silicon surface layer," Appl. Phys. A 27, pp. 153-160, 1982.
6. J. Bialkowski, Ph.D. Thesis, University of Essen, 1998.
7. A. Boroviec, M. MacKenzie,G.C. Weatherly, and H.K. Haugen, "Electron and atomic force microscopy studies of femtosecond laser machining of Si, GaAs and InP," CLEO 2001 Proc. pp. 440-441, 2001.
8. M. von Allmen, Laser-Beam Interactions with Materials, Springer, Berlin, 1995.
9. V.V. Temnov, K. Sokolowski-Tinten, and D. von der Linde, "Ultrafast time-resolved interferometry at femtosecond laser excited surfaces," CLEO 2002 Proc. pp. 32, 2002.