Nanomechanical characterization of thin Ti-Pt-Au multilayers deposited on top of LiNbO3 wafer

Composites Science and Technology

Volumn 65, Issue 9 SPEC. ISS., 2005, Pages 1414-1420

  Chouanine, L ^a   Takano, M ^a   Kamiya, O ^a   Nishida, M ^a  

^a AKITA UNIVERSITY   (Japan)

Author keywords

A. Layered structures; B. Interfacial strength; C. Delamination; D. Hardness testing; Thin films

Indexed keywords

BRITTLENESS; CHARACTERIZATION; DIAMONDS; DUCTILITY; ELASTIC MODULI; FAILURE (MECHANICAL); GOLD; HARDNESS; INDENTATION; LITHIUM NIOBATE; PLATINUM; THIN FILMS; TITANIUM;

ADHESIVE FAILURE; NANOINDENTATION TECHNIQUE; NANOMECHANICAL CHARACTERIZATION; NANOSCRATCH TESTS;

MULTILAYERS;

COMPOSITE;

EID: 18744401073     PISSN: 02663538     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compscitech.2004.12.012     Document Type: Article

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