SCOPUS 정보 검색 플랫폼

Conference Proceedings- European Microwave Conference

Volumn 1, Issue , 2004, Pages 169-172

Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers

(4) Mille, V a Bourzgui, N E a Medjdoub, F a Bocquet, B a

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; DIELECTRIC MATERIALS; ELECTRIC NETWORK ANALYZERS; FOOD PROCESSING; GOLD; ORGANIC POLYMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRODUCT DESIGN; SILICON; SPECTROSCOPIC ANALYSIS; TRANSDUCERS;

BIO-MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROFLUIDS; MICROSYSTEMS; SILICON-PTMDS;

MICROELECTROMECHANICAL DEVICES;

EID: 18744399373 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (27)

References (7)

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- (2003) Phys. Med. Biol. , vol.48 , pp. 3625-3636
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4
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- Remote nitrogen plasma deposition of organosilicon films with low permittivity
- Toulouse, 25-26th Nov
- E. Vestiel, C. Jama, P. Descamps, J. Vindhevogel, O. Dessaux and P. Goudmand, Remote nitrogen plasma deposition of organosilicon films with low permittivity, ESPID 99, 1st European Symposium on Plasma process Induced Damage, Toulouse, 25-26th Nov 1999
- (1999) ESPID 99, 1st European Symposium on Plasma Process Induced Damage
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5
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- Millimeter and sub-millimeter waves for MEMS biosensors
- Electronics, Sendai, Japan, Sept.
- B. Bocquet, N. Bourzgui, Y. Guhel, "Millimeter and sub-millimeter waves for MEMS biosensors", 11th IEEE Int. Conf. on Terahertz, Electronics, Sendai, Japan, Sept. 2003
- (2003) 11th IEEE Int. Conf. on Terahertz
- Bocquet, B.¹ Bourzgui, N.² Guhel, Y.³

6
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- Design of silicon-PPTMDS BioMEMS by cold RPECVD
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