Quantitative characterization of the fabrication processes of domain-inverted layers in LiTaO 3 by the line-focus-beam ultrasonic material characterization system

Journal of Applied Physics

Volumn 92, Issue 7, 2002, Pages 3958-3966

  Miyashita, Masahito ^a   Kushibiki, Jun Ichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION CHARACTERISTICS; FABRICATION PROCESS; FREQUENCY RANGES; LAYER THICKNESS; LEAKY SURFACE ACOUSTIC WAVES; LINE-FOCUS-BEAM ULTRASONIC MATERIAL CHARACTERIZATIONS; PROCESS TEMPERATURE; PROTON EXCHANGE; QUANTITATIVE CHARACTERIZATION; TEMPERATURE INCREASE RATE; TEMPERATURE VARIATION; ULTRASONIC FREQUENCY; VELOCITY CHANGES; VELOCITY VARIATIONS;

ACOUSTIC SURFACE WAVE DEVICES; DISPERSIONS; FABRICATION; PROTONS;

VELOCITY;

EID: 18644376450     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1504501     Document Type: Article

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