Quantitative characterization of proton-exchanged layers in LiTaO3 optoelectronic devices by line-focus-beam acoustic microscopy

IEEE Photonics Technology Letters

Volumn 8, Issue 11, 1996, Pages 1516-1518

  Kushibiki, J ^a,b   Miyashita, M ^b   Chubachi, N ^a,b  

^a IEEE

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; ACOUSTIC SURFACE WAVE DEVICES; ANNEALING; DIFFUSION IN SOLIDS; INTEGRATED CIRCUIT MANUFACTURE; LIGHT PROPAGATION; OPTOELECTRONIC DEVICES; OXIDES; PROTONS; REFRACTIVE INDEX; SECOND HARMONIC GENERATION; ULTRASONIC MEASUREMENT;

LEAKY SURFACE ACOUSTIC WAVES (LSAW); LINE FOCUS BEAM ACOUSTIC MICROSCOPY;

OPTICAL WAVEGUIDES;

EID: 0030285411     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.541568     Document Type: Article

References (8)

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8. 3," J. Appl. Phys., vol. 72, pp. 5061-5069, 1992.