Preparation of dense carbon nanotube film using microwave plasma-enhanced chemical vapor deposition

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 855-858

  Taniguchi, M ^a   Nagao, H ^a   Hiramatsu, M ^a   Ando, Y ^a   Hori, M ^b  

^a MEIJO UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Catalytic processes; High resolution electron microscopy; Nanotubes; Plasma CVD

Indexed keywords

CATALYSIS; CATALYSTS; CHEMICAL VAPOR DEPOSITION; COBALT; HIGH RESOLUTION ELECTRON MICROSCOPY; LASER ABLATION; MICROWAVES;

CATALYTIC PROCESSES; MULTI-LEVEL INTERCONNECTIONS; PLASMA CVD; PLASMA ENVIRONMENT;

CARBON NANOTUBES;

EID: 18444413298     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.10.002     Document Type: Conference Paper

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