Characteristics of 1 MHz discharge in SF6/O2 mixture in a parallel-plate system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5290-5295

  Aoyagi, Kenji ^a   Hirose, Yuuji ^a   Ishikawa, Itsuo ^a   Saito, Yukinori ^a   Suganomata, Shinji ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

1 MHz discharge; Discharge structure; Electrical characteristics; SF6 O2 mixture; Spatiotemporal profile of optical emission

Indexed keywords

ELECTRONEGATIVITY; PARALLEL PLATE SYSTEM;

ELECTRODES; LIGHT EMISSION; OXYGEN; PLASMA DENSITY; SULFUR COMPOUNDS;

GLOW DISCHARGES;

EID: 0031208510     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5290     Document Type: Article

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