Preparation of Smooth Polymer Thin Film Using Spray Method under Vacuum

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 1, 2004, Pages 307-308

  Mo, Xiaoliang ^a   Mizokuro, Toshiko ^a   Mochizuki, Hiroyuki ^a   Tanigaki, Nobutaka ^a   Hiraga, Takashi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Anneal; Polymer; Spray method; Thin film; Vacuum

Indexed keywords

ACETONE; ANNEALING; CALCIUM COMPOUNDS; FABRICATION; FILM PREPARATION; GLASS TRANSITION; OPTICAL DEVICES; THIN FILMS; VACUUM PUMPS;

POLYMER THIN FILMS; SPRAY METHODS;

POLYMETHYL METHACRYLATES;

EID: 1842810282     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.307     Document Type: Article

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