PZT thin films for micro sensors and actuators

Informacije MIDEM

Volumn 26, Issue 4, 1996, Pages 266-272

  Muralt, P ^a,b  

^a EPFL   (Switzerland)

^b MX D Ecublens   (Switzerland)

Author keywords

Integration onto silicon substrates; IR detectors; Metal Organic Decomposition; Metal Organic Chemical Vapor Deposition; Micromechanical systems; MOCVD; MOD; Piezoelectric microactuators; PZT ferroelectric materials; PZT thin films; Ultrasonic micromotors

Indexed keywords

EID: 1842761233     PISSN: 03529045     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (31)

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