Low temperature internal friction of diamond-like carbon films

Materials Science and Engineering: A

Volumn 370, Issue 1-2, 2004, Pages 142-145

  Liu, Xiao ^a   Photiadis, D M ^b   Bucaro, J A ^b   Vignola, J F ^b   Houston, B H ^b   Wu, Huey Daw ^a   Chrisey, D B ^b  

^a SFA INC   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Diamond like carbon; Double paddle oscillator; Internal friction; Internal stress; Tunneling states

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; BONDING; DIAMOND FILMS; DOPING (ADDITIVES); PULSED LASER DEPOSITION; STRESS ANALYSIS; THERMAL EFFECTS;

AMORPHOUS SOLIDS; ATOMIC TUNNELING; DIAMOND-CARBON FILMS;

INTERNAL FRICTION;

DIAMOND-LIKE CARBON;

EID: 1842737706     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2003.08.104     Document Type: Article

References (18)

1. Friedmann T.A.Sullivan J.P.Knapp J.A.Tallant D.R.Follstaedt D.M.Medlin D.L.Mirkarimi P.B. Appl. Phys. Lett. 71 1997 3820
2. Bonelli M.Fioravanti A.P.Miotello A.Ossi P.M. Europhys. Lett. 50 2000 501
3. Liu X.Photiadis D.M.Wu H.D.Chrisey D.B.Pohl R.O.Crandall R.S. Philos. Mag. B 82 2002 185
4. Liu X. White B.E. Jr. Pohl R.O. Iwanizcko E. Jones K.M. Mahan A.H. Nelson B.N. Crandall R.S. Veprek S. Phys. Rev. Lett. 78 1997 4418
5. Han D.Baugh J.Yue G.Wang Q. Phys. Rev. B 62 2000 7169
6. Pohl R.O.Liu X.Thompson E. Rev. Mod. Phys. 74 2002 991
7. D.B. Chrisey, G.K. Hubler, Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
8. White B.E. Jr. Pohl R.O. Mater. Res. Soc. Symp. Proc. 356 1995 567
9. Spiel C.L.Pohl R.O.Zehnder A.T. Rev. Sci. Instrum. 72 2001 1482
10. Ferrari A.C.Roberts J.Beghi M.G.Bottani C.E.Ferulano R.Pastorelli R. Appl. Phys. Lett. 75 1999 1893
11. Sullivan J.P.Friedmann T.A.Baca A.G. J. Electron. Mater. 26 1997 1021
12. S. Hunklinger, W. Arnold, in: W.P. Mason, P.G. Klemens (Eds.), Physical Acoustics, vol. 12, Academic Press, New York, 1976, p. 155.
13. Anderson P.W.Halperin B.I.Varma C.M. Philos. Mag. 25 1972 1
14. Phillips W.A. J. Low Temp. Phys. 7 1972 351
15. Jäckle J. Z. Phys. B: Condens. Matter 257 1972 212
16. Szörényi T.Fogarassy E.Fuchs C.Hommet J.Le Normand F. Appl. Phys. A 69 1999 S941
17. Phillips J.C. J. Non-Cryst. Solids 34 1979 153
18. Thorpe M.F. J. Non-Cryst. Solids 57 1983 355