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Volumn 25, Issue 1, 2004, Pages 90-94
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Theoretical analysis of acoustic wave propagation in ZnO/Si bi-layered system using transfer matrix method
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE FILTERS;
ACOUSTIC TRANSDUCERS;
ACTUATORS;
ELECTROSTATICS;
EQUATIONS OF MOTION;
PIEZOELECTRIC MATERIALS;
SENSORS;
SILICON WAFERS;
TENSORS;
BI-LAYERED SYSTEM;
FLEXURAL PLATE WAVE;
INTERDIGITAL TRANSDUCER;
SURFACE HORIZONTAL ACOUSTIC PLATE MODES;
TRANSFER MATRIX METHOD;
ACOUSTIC WAVE PROPAGATION;
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EID: 1842683810
PISSN: 13463969
EISSN: None
Source Type: Journal
DOI: 10.1250/ast.25.90 Document Type: Letter |
Times cited : (2)
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References (5)
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