Micro electron beam welding and laser machining-potentials of beam welding methods in the micro-system technology

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 187-192

  Smolka, G ^a   Gillner, A ^b   Bosse, L ^b   Lutzeler R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b ILT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM WELDING; LASER APPLICATIONS; MICROMACHINING; SCANNING ELECTRON MICROSCOPY;

LASER MACHINING; MICROELECTRON BEAM WELDING; MICROSYSTEM TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 1842559458     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0347-2     Document Type: Article

References (8)

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3. Dilthey U; Smolka G; Lugscheider E; Lake M (2000) Electron-beam-induced phase generation at solder systems applied with high-performance cathode sputting. VTE 13: H1-E9
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8. Klein H (2001) Laserschweißen von Kunststoffen in der Mikrotechnik, Dissertation an der RWTH Aachen