Characteristics of an autofocus system on a grating with period smaller than the focus beam wavelength

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5256, Issue 2, 2003, Pages 965-972

  Ogawa, Riki ^a   Sugihara, Shinji ^a   Honguh, Yoshinori ^a   Nagahama, Hiroyuki ^b   Watanabe, Toshiyuki ^a   Tsuchiya, Hideo ^a  

^a TOSHIBA CORPORATION   (Japan)

^b TOPCON CORPORATION   (Japan)

Author keywords

Obliquely incident light; Polarization change; RCWA simulation; Sub wavelength grating; TTL autofocus system; Visible light source

Indexed keywords

ACTUATORS; BIREFRINGENCE; COMPUTER SIMULATION; DIFFRACTION GRATINGS; IMAGE ANALYSIS; LIGHT POLARIZATION; LIGHT SOURCES; MICROMETERS; OPTICAL SYSTEMS;

AUTOFOCUS SYSTEMS; OBLIQUELY INCIDENT LIGHT;

PHOTOLITHOGRAPHY;

EID: 1842526985     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.517820     Document Type: Conference Paper

References (4)

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3. D. Raguin, "Subwavelength structured surfaces and their application", Proc. SPIE, CR49, P234-261, 1993
4. M. G. Moharam, et al., "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings", J. Opt. Soc. Am. A Vol. 12, pp.106 8-1076, 1995