Multi-layered circuit board precisely pressed/damascened on glass plates

Precision Engineering

Volumn 28, Issue 2, 2004, Pages 181-185

  Nakao, Masayuki ^a   Kumaki, Jinyo ^a,b   Matsumoto, Kiyoshi ^a   Hatamura, Yotaro ^a,c  

^a UNIVERSITY OF TOKYO   (Japan)

^b SONY CORPORATION   (Japan)

^c KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Circuit pattern; Damascene; Glass plate; Multi layered electric circuit board; Press

Indexed keywords

DRY ETCHING; ELECTROLYSIS; ERROR ANALYSIS; HOT PRESSING; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; NETWORKS (CIRCUITS); PHOTOLITHOGRAPHY; PLATES (STRUCTURAL COMPONENTS); QUANTUM THEORY;

CIRCUIT PATTERN; DAMASCENE; GLASS PLATE; MULTI-LAYERED ELECTRIC CIRCUIT BOARD;

GLASS;

EID: 1842421944     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2003.08.003     Document Type: Article

References (5)

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2. K. Matsumoto, et al. In: Proceedings of MEMS'98. 1998. p. 127.
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4. Loewen EG, et al. Diffraction gratings and application. 1997. p. 577.
5. Shinoda T, et al. J Jpn Appl Phys 1996:65-67;723.