Deposition and characterization of a-C:H coatings using a glow discharge

Surface and Coatings Technology

Volumn 187, Issue 1, 2004, Pages 54-62

  Rabbani, F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Amorphous; Carbon; Cluster; Nano indentation; Raman scattering spectroscopy; SEM; TEM

Indexed keywords

CARBON; DEPOSITION; ELASTIC MODULI; GLOW DISCHARGES; HARDNESS; HYDROGENATION; PHYSICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; STRESSES;

AMORPHOUS HYDROGENATED CARBON; COATING THICKNESS; ELASTIC RECOIL DETECTION; GLOW DISCHARGE PLASMA TECHNIQUE;

COATINGS;

COATING;

EID: 18244395846     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.01.016     Document Type: Article

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