Investigation of longitudinal-optical phonon-plasmon coupled modes in SiC epitaxial film using Fourier transform infrared reflection

Journal of Electronic Materials

Volumn 34, Issue 4, 2005, Pages 320-323

  Sunkari, Swapna ^a   Mazzola, M S ^a   Mazzola, J P ^b   Das, Hrishikesh ^a   Wyatt, J L ^a  

^a MISSISSIPPI STATE UNIVERSITY   (United States)

^b SemiSouth Laboratories Inc   (United States)

Author keywords

4H SiC; Fourier transform infrared reflection (FTIR); Free carrier concentration (FCC); Longitudinal optical (LO) phonon plasmon coupled modes (LPP)

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITROGEN; PHONONS; RAMAN SCATTERING; SEMICONDUCTOR DOPING; THIN FILMS;

4H-SIC; FREE-CARRIER CONCENTRATION (FCC); LONGITUDINAL-OPTICAL (LO) PHONON-PLASMON COUPLED MODES (LPP);

SILICON CARBIDE;

EID: 18244377987     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0103-8     Document Type: Conference Paper

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