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Volumn 22, Issue 4, 2005, Pages 913-916
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Crack-free BaTiO3 films on Si with SiO2, MgO, or Al2O3 buffer layers
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
MAGNESIA;
OPTICAL FILMS;
OPTICAL PROPERTIES;
OPTICAL WAVEGUIDES;
POLYCRYSTALLINE MATERIALS;
PULSED LASER DEPOSITION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICA;
SILICON;
SILICON ON SAPPHIRE TECHNOLOGY;
X RAY DIFFRACTION ANALYSIS;
BUFFER LAYERS;
OPTICAL ATTENUATION;
POLYCRYSTALLINE FILMS;
BARIUM TITANATE;
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EID: 18144381034
PISSN: 07403224
EISSN: None
Source Type: Journal
DOI: 10.1364/JOSAB.22.000913 Document Type: Article |
Times cited : (4)
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References (13)
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