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Volumn 22, Issue 4, 2005, Pages 913-916

Crack-free BaTiO3 films on Si with SiO2, MgO, or Al2O3 buffer layers

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; MAGNESIA; OPTICAL FILMS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; POLYCRYSTALLINE MATERIALS; PULSED LASER DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SILICON; SILICON ON SAPPHIRE TECHNOLOGY; X RAY DIFFRACTION ANALYSIS;

EID: 18144381034     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.22.000913     Document Type: Article
Times cited : (4)

References (13)
  • 3
    • 0036670760 scopus 로고    scopus 로고
    • "Elastic deformation in thin freestanding ferroelectric films"
    • J.P. Nair and I. Lubomirsky, "Elastic deformation in thin freestanding ferroelectric films," Adv. Eng. Mater. 4, 604-607 (2002).
    • (2002) Adv. Eng. Mater. , vol.4 , pp. 604-607
    • Nair, J.P.1    Lubomirsky, I.2
  • 4
    • 36449008603 scopus 로고
    • "Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon"
    • R.A. McKee, F. J. Walker, J. R. Conner, E. D. Specht, and D. E. Zelmon, "Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon," Appl. Phys. Lett. 59, 782-784 (1991).
    • (1991) Appl. Phys. Lett. , vol.59 , pp. 782-784
    • McKee, R.A.1    Walker, F.J.2    Conner, J.R.3    Specht, E.D.4    Zelmon, D.E.5
  • 7
    • 0003427458 scopus 로고
    • 2nd ed., Addison-Wesley Series in Metallurgy and Materials (Addison-Wesley Reading, Mass.)
    • B. D. Cullity, Elements of X-Ray Diffraction, 2nd ed., Addison-Wesley Series in Metallurgy and Materials (Addison-Wesley Reading, Mass., 1978), p. 356.
    • (1978) Elements of X-Ray Diffraction , pp. 356
    • Cullity, B.D.1
  • 9
    • 0015752050 scopus 로고
    • "Measurement of thin film parameters with a prism coupler"
    • R. Ulrich and R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12, 2901-2908 (1973).
    • (1973) Appl. Opt. , vol.12 , pp. 2901-2908
    • Ulrich, R.1    Torge, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.