Polymeric substrate microcrystalline-silicon strain sensor

Device Research Conference - Conference Digest, DRC

Volumn , Issue , 2004, Pages 105-106

  Zhou, Lisong ^a   Jackson, Tom ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS CURRENT; BIAS ELECTRODES; METALLIC FOILS; STRAIN SENSORS;

ANISOTROPY; CRYSTALLINE MATERIALS; ELECTRIC POTENTIAL; ELECTRIC POWER UTILIZATION; GAGES; PLASTIC FILMS; POLYIMIDES; REACTIVE ION ETCHING; SPUTTERING;

SILICON SENSORS;

EID: 18044388167     PISSN: 15483770     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DRC.2004.1367805     Document Type: Conference Paper

References (2)

1. G. de Cesare, M Gavesi, F. Palma, B. Riccò, Thin Solid Films, vol. 427, p. 191 (2003).
2. th IEEE Photovoltaic Specialists Conference, page 699-702 (1997).