SCOPUS 정보 검색 플랫폼

Volumn 32, Issue 1-3, 2004, Pages 79-83

Synthesis of nano silica particles for polishing prepared by sol-gel method

Author keywords

Cocoon shaped particle; Nano; Particles; Polish; Silica

Indexed keywords

AMMONIA; ASPECT RATIO; HYDROLYSIS; METHANOL; ORGANIC SOLVENTS; POLISHING; SILICA; SILICON WAFERS; SOL-GELS; SYNTHESIS (CHEMICAL);

COCOON SHAPED PARTICLES; NANO; PARTICLES; POLISH;

NANOSTRUCTURED MATERIALS;

EID: 17744380827 PISSN: 09280707 EISSN: None Source Type: Journal
DOI: 10.1007/s10971-004-5769-5 Document Type: Conference Paper

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.