Numerical study on the spectroscopic ellipsometry of lamellar gratings made of lossless dielectric materials

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 22, Issue 4, 2005, Pages 745-751

  Watanabe, Koki ^a   Pištora, Jaromír ^b   Foldyna, Martin ^b   Postava, Kamil ^b   Vlček, Jaroslav ^b  

^a FUKUOKA INSTITUTE OF TECHNOLOGY   (Japan)

^b VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTATIONAL METHODS; CONVERGENCE OF NUMERICAL METHODS; DIELECTRIC MATERIALS; ELLIPSOMETRY; ESTIMATION; FOURIER TRANSFORMS; OPTICAL FILMS; SPECTROSCOPIC ANALYSIS;

ELLIPSOMETRIC ANGLES; LAMELLAR GRATINGS; LI'S FOURIER FACTORIZATION RULES; LOSSLESS DIELECTRIC MATERIALS; METALLIC GRATINGS; SPECTROSCOPIC ELLIPSOMETRY;

DIFFRACTION GRATINGS;

EID: 17644395619     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.22.000745     Document Type: Article

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