Spectral ellipsometry of binary optic gratings

Optica Applicata

Volumn 33, Issue 2-3, 2003, Pages 251-262

  Pištora, Jaromir ^a,b   Yamaguchi, Tomuo ^a   Vlček, Jaroslav ^b   Mistrik, Jan ^a   Horie, Masahiro ^c   Smatko, Vasilij ^d   Kováčová, Eva ^d   Postava, Kamil ^b   Aoyama, Mitsuru ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

^c DAINIPPON SCREEN MFG CO LTD   (Japan)

^d INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

Lamellar grating; Spectral ellipsometry

Indexed keywords

DIFFRACTION GRATINGS; FOURIER OPTICS; LIGHT PROPAGATION; LIGHT REFLECTION; SILICA;

BINARY OPTIC GRATINGS; COUPLED WAVE METHOD; LAMELLAR GRATING; SPECTRAL ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 0346318526     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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