Surface profile measurement using chromatic confocal microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5606, Issue , 2004, Pages 124-131

  Shi, Kebin ^a   Li, Peng ^a   Yin, Shizhuo ^a   Liu, Zhiwen ^a  

^a The Center for Nanotechnology Education and Utilization   (United States)

Author keywords

Chromatic confocal microscopy; Supercontinuum; Surface profile measurement

Indexed keywords

CHROMATIC CONFOCAL MICROSCOPY; MICROCIRCUIT CHIP; SUPERCONTINUUM; SURFACE PROFILE MEASUREMENT;

ABERRATIONS; CHARGE COUPLED DEVICES; DISPERSION (WAVES); IMAGING TECHNIQUES; LIGHT SOURCES; LIGHTING; PROBLEM SOLVING; SENSITIVITY ANALYSIS;

OPTICAL MICROSCOPY;

EID: 17644392458     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.571595     Document Type: Conference Paper

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